Optimal Engineering Systems, Inc. (OES)
The Sub-micron, AU200-50x50 Open Aperture Alignment Stage from Optimal Engineering Systems, Inc. (OES) with a 90mm by 90mm open aperture is the ideal choice for applications requiring extreme precision such as: Semiconductor wafer inspection and handling, laser drilling and machining, testing, scanning, inspection, measurements, optical applications, medical diagnostic devices and instrument assembly, calibration, and inspection, 3D Printing, and alignment. The linear travel of the X and Y axes is 50mm by 50mm, and the resolution of each axis is 5µm (non-micro-step) or 0.5µm (with 10 micro-steps per step motor driver in use), the repeatability is 1.5µm. The 1mm per-turn lead screws and preloaded V-groove and crossed roller bearings contribute to the high precision and stiffness of the AU200-50x50 Open Aperture Alignment Stage.
The XY table measures 155mm x 155mm and features a precision pattern of drilled and threaded mounting holes to facilitate the addition of tooling or fixtures. This low profile black anodized aluminum XY stage is easy to integrate into new or existing systems.
The two-phase stepper motors with knobs for manual adjustments of each axis are standard for the AU200-50x50 Open Aperture Alignment Stage, however, the knobs can be replaced with 500 Cycles-per-Revolution Quadrature Optical Encoders for position verification.
Compatible Multi-axis Motion Controllers are also available from OES and the AU200-50x50 Open Aperture Alignment Stage can be ordered as a complete plug-and-play system.